Porous Vacuum Chucks
Porous Chuck Material Options
Microporous vacuum chucks are produced using extremely flat, porous material designed to clamp thin workpieces with high accuracy. The porous material used includes ceramic, Metapor© CE100, MC100, BF100 porous aluminum, and sintered bronze. Each material has a different porosity that will affect the vacuum clamping capability of the chuck. The specific porous material used would be determined by the specific application requirements.
High Precision Chuck Features
- Vacuum chucks using porous ceramic, bronze or aluminum.
- Flat clamping surface does not deform work pieces.
- Great for optics, soft materials, and thin work.
- Ceramic chucks ideal for clean room and wafer inspection.
- Metapor© material available for custom 3-D fixture applications.
Precision Porous Vacuum Chuck Applications
Microporous chucks are best suited for the light, dry processing of very thin materials, such as foils, paper, thin films and metal strips. This type of vacuum chuck has been supplied for semiconductor wafer applications, optics, electronics and precision inspection applications.
For inspection applications, Microporous chucks are available with a flatness specification of less than 5 microns. Due to the design of this chuck, the work piece is fully supported, and will not bend or deform into a slot or hole typically found in standard perforated vacuum chucks. This makes the Microporous vacuum chuck unique and best suited for super high accuracy measuring requirements. Learn more about porous chuck materials and uses in this IBAG blog post: Holding Parts with a Porous Vacuum Chuck
Vacuum Chuck System Customization Options
Microporous or porous chucks are available in stock sizes, as well as custom configurations for rectangular as well as circular chuck designs. Custom chucks, made to fit exact part sizes can be readily supplied based on customer specifications. Metapor© material is also available in standard block sizes, to be used for special vacuum chuck system applications and to produce dedicated 3-D vacuum fixtures.
Contact IBAG for Witte Microporous or Porous Vacuum Chucks Today
Contact IBAG North America to determine which Witte Vacuum Pump will successfully support your Microporous vacuum chuck, as well as accessories and O-ring seal material to guarantee the best performance for your vacuum workholding needs. Request a quote or give us a call at 203-407-0397 to get your order started. For other helpful resources, check out our IBAG Video Resources.
